发明名称 |
Method for forming polycrystalline silicon film of polycrystalline silicon TFT |
摘要 |
Disclosed is a method for forming a polycrystalline silicon film of a polycrystalline silicon thin film transistor. The method includes a step of crystallizing an amorphous silicon film deposited on a glass substrate by irradiating a laser beam onto the amorphous silicon film using a mask pattern. The glass substrate is horizontally moved by a predetermined distance unit corresponding to a translation distance of the mask pattern when the laser beam is irradiated onto the amorphous silicon film through a mask having the mask pattern, thereby growing grains in a circular shape.
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申请公布号 |
US7205033(B2) |
申请公布日期 |
2007.04.17 |
申请号 |
US20040934826 |
申请日期 |
2004.09.03 |
申请人 |
BOE HYDIS TECHNOLOGY CO., LTD. |
发明人 |
KIM EOK SU;LEE HO NYEON;RYU MYUNG KWAN;PARK JAE CHUL;SON KYOUNG SEOK;LEE JUN HO;KWON SE YEOUL |
分类号 |
B05D3/06;H01L21/20;B05D3/00;C23C16/04;C30B13/24;C30B29/06;G02F1/13;H01L21/027;H01L21/268;H01L21/324;H01L21/336;H01L27/12;H01L29/786;H01L31/0392 |
主分类号 |
B05D3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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