EPITAXIAL REACTOR WITH SUSCEPTOR CONTROLLED POSITIONING,申请号KR20077001661-传众专利搜索

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发明名称	EPITAXIAL REACTOR WITH SUSCEPTOR CONTROLLED POSITIONING
摘要
申请公布号	KR20070040797(A)	申请公布日期	2007.04.17
申请号	KR20077001661	申请日期	2007.01.23
申请人	LPE SPA	发明人	PRETI FRANCO;OGLIARI VINCENZO;TARENZI GIUSEPPE
分类号	C23C16/458	主分类号	C23C16/458
代理机构		代理人
主权项
地址

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