APPARATUS AND METHOD FOR TREATING PLASMA,申请号KR20020066876-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR TREATING PLASMA
摘要
申请公布号	KR100708313(B1)	申请公布日期	2007.04.17
申请号	KR20020066876	申请日期	2002.10.31
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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