| 发明名称 |
Composition having permitivity being radiation-sensitively changeable and method for forming permitivity pattern |
| 摘要 |
A radiation sensitive dielectric constant changing composition comprising (A) a decomposable compound, (B) a nondecomposable compound, (C) a radiation sensitive decomposer and (D) a stabilizer.
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| 申请公布号 |
US7205085(B2) |
申请公布日期 |
2007.04.17 |
| 申请号 |
US20030381589 |
申请日期 |
2003.04.01 |
| 申请人 |
JSR CORPORATION |
发明人 |
NISHIMURA ISAO;BESSHO NOBUO;KUMANO ATSUSHI;YAMADA KENJI |
| 分类号 |
G03F7/023;G03F7/00;G03F7/004;G03F7/039;G03F7/075;G03F7/26;G03F7/38;H01L21/027;H01L21/312;H01L23/12;H05K1/00;H05K1/16 |
主分类号 |
G03F7/023 |
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