| 摘要 |
The present invention relates to an atmospheric pressure plasma shower unit. An object of the present invention is to provide an atmospheric pressure plasma shower unit that is configured to emit plasma toward an object to be treated (especially, a chip-mounting substrate) in a shower manner, is very advantageous to plasma cleaning of the object to be treated which is carried by a carrying means, and solves the problems in the prior art such as increase in temperature due to parasitic discharge. To achieve the object, the present invention provides an atmospheric pressure plasma shower unit, comprising an active electrode part formed of a pattern electrode on a dielectric and activated when a high voltage is applied to the pattern electrode; and a ground electrode part disposed to generate plasma between the active electrode part and the ground electrode part and formed with a plurality of plasma holes through which the generated plasma is emitted outwardly. |
