METHOD FOR MANUFACTURING ELEMENT SUBSTRATE AND SUPPORTING APPARATUS FOR THE SUBSTRATE,申请号KR20060097013-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING ELEMENT SUBSTRATE AND SUPPORTING APPARATUS FOR THE SUBSTRATE
摘要
申请公布号	KR20070040300(A)	申请公布日期	2007.04.16
申请号	KR20060097013	申请日期	2006.10.02
申请人	MITSUBISHI ELECTRIC CORPORATION	发明人	SAKAMOTO HIROKAZU;ARAKI TOSHIO;AOKI MASARU;MORITA HIROMASA
分类号	H01L21/687	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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