| 摘要 |
PURPOSE: An optical signal distributer is provided to make a micro mirror to elect in a vertical direction by including a stopper controlling an electrostatic power and a magnetic force . CONSTITUTION: A base(42) is layered on a substrate(40). A receiving hole(44) is formed on the base(42). A micro mirror(30) reflects an optical signal by standing up a straight vertical to the base(42) and passes the optical signal which is accepted to the receiving hole(44). A stopper(50) is formed in a protrusion on the base(42) and controls the standing state of the micro mirror(30). A twist spring(54) is interposed between the base(42) and the micro mirror(30), and it supports the micro mirror with elastic force and rounds the stopper(50). A magnetic driving unit is provided in order to drive the micro mirror(30) by magnetic force. The magnetic driving unit is comprised of a magnetic driving source provided on the upper part of the micro mirror(30) and a magnetic body(56) mounted on the both parts of one face of the micro mirror(30). |
