VERFAHREN UND VORRICHTUNG ZUM BEHANDELN EINES SUBSTRATS,申请号AT20030782978T-传众专利搜索

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发明名称	VERFAHREN UND VORRICHTUNG ZUM BEHANDELN EINES SUBSTRATS
摘要
申请公布号	AT358192(T)	申请公布日期	2007.04.15
申请号	AT20030782978T	申请日期	2003.12.12
申请人	OTB GROUP B.V.	发明人	DINGS, FRANCISCUS, CORNELIUS;EVERS, MARINUS, FRANCISCUS, JOHANUS;HOMPUS, MICHAEL, ADRIANUS, THEODORUS;BIJKER, MARTIN, DINANT
分类号	C23C16/04;C23C16/50;C23C16/513;H01J37/32;(IPC1-7):C23C16/50	主分类号	C23C16/04
代理机构		代理人
主权项
地址

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