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发明名称
VORRICHTUNG ZUR HERSTELLUNG ELEKTRISCH LEITFÄHIGER DURCHGÄNGE IN EINEM HALBLEITERWAFER MITTELS THERMOMIGRATION
摘要
申请公布号
AT358196(T)
申请公布日期
2007.04.15
申请号
AT20040703345T
申请日期
2004.01.20
申请人
HTM REETZ GMBH;SILICON SENSOR GMBH
发明人
KUDELLA, FRANK;REETZ, ROLAND;EN LEN, MARKO;RASEL, MARIO;SCHINDEL, KARSTEN;KRIEGEL, BERND
分类号
C30B31/10;C30B31/12;H01L21/00;(IPC1-7):C30B31/10
主分类号
C30B31/10
代理机构
代理人
主权项
地址
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