发明名称 PROTECTION D'UN GETTER EN COUCHE MINCE
摘要 <p>A method for installing a sorption element in a cavity including: disposing, within the cavity, a getter material, a reaction material, and a protective material, the protective material covering at least one part of the getter material so as to bury the at least one part; raising a temperature up to at least one removal temperature; and moving the protective material towards the reaction material by reaction between the protective material and the reaction material so that at least one portion of the part of the getter material is no longer covered with the protective material.</p>
申请公布号 FR2883099(B1) 申请公布日期 2007.04.13
申请号 FR20050050649 申请日期 2005.03.14
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT PUBLIC A CARACTERE SCIENTIFIQUE TECHNIQUE ET INDUSTRIEL 发明人 SOURIAU JEAN CHARLES;DELEVOYE ELISABETH;BALERAS FRANCOIS;HENRY DAVID
分类号 H01L23/26;B81B7/00 主分类号 H01L23/26
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