METHOD AND APPARATUS FOR SHIELDING A DEVICE FROM A SEMICONDUCTOR WAFER PROCESS CHAMBER,申请号KR20010009343-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR SHIELDING A DEVICE FROM A SEMICONDUCTOR WAFER PROCESS CHAMBER
摘要
申请公布号	KR100707053(B1)	申请公布日期	2007.04.13
申请号	KR20010009343	申请日期	2001.02.23
申请人		发明人
分类号	H01L21/00;C23C14/56;H01L21/203	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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