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发明名称
PROCEDE DE REALISATION DE MULTICOUCHES SUR UN SUBSTRAT
摘要
申请公布号
FR2876841(B1)
申请公布日期
2007.04.13
申请号
FR20040011075
申请日期
2004.10.19
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT PUBLIC A CARACTERE SCIENTIFIQUE TECHNIQUE ET INDUSTRIEL
发明人
TAUZIN AURELIE;GILET PHILIPPE
分类号
H01L33/00;H01S3/00
主分类号
H01L33/00
代理机构
代理人
主权项
地址
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