| 摘要 |
PROBLEM TO BE SOLVED: To provide an eccentric vibration type film sheet expander with improved expansion characteristics while allowing a film sheet to be uniformly expanded by externally expanding it with vibration. SOLUTION: The eccentric vibration type film sheet expander 1000 is composed so as to eccentrically and horizontally move a lower expansion ring 106 of a stage part 102. The film sheet is externally expanded in a circumferential place where the film sheet comes into contact with the lower expansion ring 106 by the eccentric and horizontal movement of the lower expansion ring 106. The eccentric vibration type film sheet expander 1000 thereby divides a diced wafer into chips while making an expansion rate constant on the whole face of the film sheet. COPYRIGHT: (C)2007,JPO&INPIT |
