| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost gas barrier film having high gas barrier properties, and a method of manufacturing the gas barrier film simply and stably. SOLUTION: This gas barrier film has an inorganic compound layer formed on a polymer film, and is characterized in that the ratio of the O atomic concentration to the Al atomic concentration, in the inorganic compound layer, measured by an X-ray photoelectron spectrometry, is 2 to 3 and the C atomic concentration, of the inorganic compound layer, measured by SIMS, is 1×10<SP>21</SP>to 1×10<SP>22</SP>atoms/cc. The method for manufacturing the gas barrier film is first to unwind the polymer film, and then, form an inorganic matter layer in an atmosphere of gas plasma containing a carbon element with 0.1 to 10% carbon atomic number to the oxygen atomic number charged during forming the inorganic matter layer, when the inorganic matter layer is formed on the surface of the film by vaporizing a metal. COPYRIGHT: (C)2007,JPO&INPIT |
