| 摘要 |
PROBLEM TO BE SOLVED: To prevent scattering of abrasion powder and dust in a conveyor device used in a semiconductor manufacture line. SOLUTION: The device is provided with a lower case 10 comprising a pair of right and left conveyance frames 11 and 12 extending in a cross section X and a planar frame 13 connecting lower parts of a pair of the conveyance frames; an upper cover 20 connected to the lower case so that it closely demarcates an inner space S by making it confront with the planar frame 13 from above, and so that it demarcates a gap G in prescribed width extending in the cross direction X by making it confront with a pair of the conveyance frames from a right/left direction Y; a carrier 30 which is supported by a pair of the right and left conveyance frames so that it supports an object to be conveyed and conveys it to the cross direction; a driving mechanism 40 arranged in the inner space so as to drive the carrier; and suction means 50 and 60 for sucking the inner space. Thus, abrasion powder and dust are sucked by the sucking means and are prevented from scattering to outside. COPYRIGHT: (C)2007,JPO&INPIT
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