COMBTOOTH-SHAPED PROBE, ATOMIC FORCE MICROSCOPE EQUIPPED WITH IT, AND DISPLACEMENT MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a combtooth-type probe reduced in product irregularity and enhanced in product yield. SOLUTION: The comb-teeth-shaped probe 10 includes a stationary part 1, a movable part 2, a probe 3 and a support part 4. A combteeth drive 10a is constituted so that the comb-teeth-shaped uneven part of the stationary part 1 and the comb-teeth-shaped uneven part of the movable part 2 are meshed with each other in a non-contact state and the movable part 2 is vibrated in a Z-direction by the electrostatic force applied by an AC power supply 7. Since a functional thin film like a piezoelectric layer is not used in order to excite the movable part 2, the product yield of the comb-teeth-shaped probe 10 is high. When the movable part 2 receives the effect of external force (the atomic force between the probe 3 and a sample S), the admittance of the comb tooth drive 10a changes. The admittance is detected by an admittance detector 20 and the displacement quantity of the movable part 2 is calculated from the detection value. COPYRIGHT: (C)2007,JPO&INPIT