| 摘要 |
PROBLEM TO BE SOLVED: To provide a pump device of large flow rate by expanding the displacement of a diaphragm actuator. SOLUTION: The pump device 1 is provided with a housing 10, and the diaphragm actuator 20 partitioning an inner space to a first pump chamber 2 and a second pump chamber 3 between inner surfaces 11c, 12c to face two inner surfaces 11c, 12c in a housing 11 and having a first restriction hole 21a and a second restriction hole 21b communicating from the first pump chamber 2 to a second pump chamber 3 thereon. The diaphragm actuator 20 has a bimorph type structure putting a shim plate 22 and a float valve 24 between a lower side piezoelectric sheet 21A and a lower side piezoelectric sheet 21B, has the first restriction hole 21a formed on the lower side piezoelectric sheet 21A and the second restriction hole 21b formed on the upper side piezoelectric sheet 21B. The float valve 24 is stored on a joining surface of the lower side piezoelectric sheet 21A and the upper side piezoelectric sheet 21B. COPYRIGHT: (C)2007,JPO&INPIT
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