发明名称 Ultraviolet Blocking Layer
摘要 Methods and apparatuses are disclosed relating to blocking ultraviolet electromagnetic radiation from a semiconductor. Ultraviolet electromagnetic radiation, such as ultraviolet electromagnetic radiation generated by a plasma process, which may otherwise damage a semiconductor can be blocked from one or more layers below an ultraviolet blocking layer.
申请公布号 US2007080378(A1) 申请公布日期 2007.04.12
申请号 US20060609824 申请日期 2006.12.12
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 LU CHIEN H.;SU CHIN T.
分类号 H01L31/112;C30B1/00;H01L23/552;H01L29/80;H01L31/0232 主分类号 H01L31/112
代理机构 代理人
主权项
地址