发明名称 |
Ultraviolet Blocking Layer |
摘要 |
Methods and apparatuses are disclosed relating to blocking ultraviolet electromagnetic radiation from a semiconductor. Ultraviolet electromagnetic radiation, such as ultraviolet electromagnetic radiation generated by a plasma process, which may otherwise damage a semiconductor can be blocked from one or more layers below an ultraviolet blocking layer.
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申请公布号 |
US2007080378(A1) |
申请公布日期 |
2007.04.12 |
申请号 |
US20060609824 |
申请日期 |
2006.12.12 |
申请人 |
MACRONIX INTERNATIONAL CO., LTD. |
发明人 |
LU CHIEN H.;SU CHIN T. |
分类号 |
H01L31/112;C30B1/00;H01L23/552;H01L29/80;H01L31/0232 |
主分类号 |
H01L31/112 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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