METHOD FOR MANUFACTURING PATTERN FORMING ASSEMBLY AND APPARATUS FOR MANUFACTURING PATTERN FORMING ASSEMBLY

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a pattern forming assembly by which a characteristics change pattern can be formed with high definition into a target pattern even when the pattern forming assembly is continuously manufactured, and to provide an apparatus for manufacturing a pattern forming assembly to be used for the above method.

SOLUTION: The method for manufacturing a pattern forming assembly aims to manufacture a plurality of pattern forming assemblies by carrying out a plurality of times of a pattern forming step of forming a pattern forming assembly by irradiating a pattern forming substrate the surface characteristics of which are changed by an effect of vacuum UV rays with vacuum UV rays through a photomask so as to form a characteristics change pattern with the characteristics changed on the surface of the pattern forming substrate. The method includes a deposit removing step of removing a substance depositing on the photomask, the removing step carried out during the pattern forming steps carried out in a plurality of times.

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