| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charge amplifier whose output noise is small by forming a feedback resistance whose resistance value is large in a multi-crystal silicon layer whose area is small. <P>SOLUTION: In a charge amplifier 1 whose non-inverting input terminal is connected to an amplification reference voltage 5, and whose inverting input terminal inputs a frequency signal which is 50 KHz from an oscillation type angular velocity sensor 6 having a crystal oscillator, and whose output terminal is connected through a negative feedback resistance 4 and a negative feedback capacity 3 connected in parallel to the inverting input terminal, the negative feedback resistance 4 is constituted of a multi-crystal silicon layer whose resistivity is 200 KΩ/square, whose resistance value is 320 MΩ, and whose parasitic capacity is 0.12 pF, and the capacitance value of the negative feedback capacity 3 is made 1 pF. <P>COPYRIGHT: (C)2007,JPO&INPIT |
