| 摘要 |
PROBLEM TO BE SOLVED: To provide a hand capable of efficiently and uniformly cooling the hand when a workpiece such as a glass substrate processed in hot environment is carried, and having lightweight structure in comparison with a conventional one, and a workpiece carrying robot using the hand. SOLUTION: The hand of a robot comprises a placement part 11 insulated from the outside and formed in a shape having a hollow 11a for placing the workpiece thereon, medium introducing pipes 15a, 15b, 15c, and 15d for introducing a cooling medium into the hollow 11a on one end side of the placement part 11, and a medium discharge opening 17 for discharging the cooling medium from the hollow 11a on the other end side of the placement part 11. COPYRIGHT: (C)2007,JPO&INPIT |
