| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin plate positioning method and a thin plate positioning device with which a thin plate can be accurately positioned even in low cost equipment without using an image recognition device. SOLUTION: A rotation center P is arranged on a first virtual straight straight line VL1. A rotation center confirmation sensor S1 is arranged on the first virtual straight line VL1. Aθconfirmation sensor S2 is arranged on a second virtual straight line VL2 orthogonal to the first virtual straight line VL1. An arrangement position conformation sensor S3 is arranged on a third virtual straight line VL3 orthogonal to the second virtual straight line VL2. COPYRIGHT: (C)2007,JPO&INPIT
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