METHOD OF MANUFACTURING VERTICAL COMB ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a vertical comb actuator by which steps are accurately formed between comb-shaped electrodes opposing to each other in a simple manufacturing process. SOLUTION: The vertical steps are formed between the comb-shaped electrodes 2 and 5 opposing to each other by adjusting the film thickness of a protective layer and a conductive thin film. Thus, the steps are accurately formed between the comb-shaped electrodes opposing to each other in the simple manufacturing process. COPYRIGHT: (C)2007,JPO&INPIT