METHOD AND APPARATUS FOR PREVENTING ALD REACTANTS FROM DAMAGING VACUUM PUMPS

摘要

A secondary reaction chamber (31) with a mesh reactor element (38) and a heater assembly (34) are positioned in a foreline (12) between a CVD reaction chamber (14) and a vacuum pump (16) to mix and react all previously unreacted precursor reactants to remove them from the effluent before they can reach and damage the vacuum pump.