RESONATOR SYSTEM WITH A PLURALITY OF INDIVIDUAL MECHANICALLY COUPLED RESONATORS AND METHOD OF MAKING SAME

摘要

A resonator system (10) wherein a plurality of resonators (16, 18) each including piezoelectric material, are suspended relative to a substrate (12). An edge of each resonator (16, 18) is mechanically coupled to an edge of another resonator, and the plurality of resonators (16, 18) expand and contract reaching resonance in response to an applied electric field.