发明名称 SOLDER BUMP STRUCTURE FOR FLIP CHIP SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a solder bump structure solving both metallurgical problems and problems on mechanical stability in flip chip technique. <P>SOLUTION: In a semiconductor device 100 provided with an interconnecting layer arranged on a semiconductor substrate, an inert layer 122 is arranged on the interconnecting layer 115, and a support opening 125 of the solder bump 128 is formed in the inert layer 122. A plurality of support pillars 124 including a conductor material are arranged in the support opening 125 of the solder bump 128. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007096315(A) 申请公布日期 2007.04.12
申请号 JP20060261622 申请日期 2006.09.27
申请人 AGERE SYSTEMS INC 发明人 BACHMAN MARK A;BITTING DONALD S;CHITTIPEDDI SAILESH;KANG SEUNG H;MERCHANT SAILESH M
分类号 H01L21/60;H01L21/3205;H01L23/52 主分类号 H01L21/60
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