发明名称 GASPANEEL
摘要 <p>A manifold system for enabling a distribution of fluids comprising a plurality of individual manifold blocks (1600), each manifold block having a single fluid passageway with an entrance port (1634) and an exit port (1636) accessing only a common surface; and means (1950-1956) for removably interlocking a pair of adjacent manifold blocks to each other to operatively permit their respective fluid passageways to be positioned for interconnection.</p>
申请公布号 DE69837218(D1) 申请公布日期 2007.04.12
申请号 DE1998637218 申请日期 1998.10.28
申请人 CELERITY INC. 发明人 REDEMANN, ERIC J.;VU, KIM N.
分类号 F16K11/20;F16K27/00;C23C16/44;C23C16/455;F16K11/10;F16K11/22;F16K51/00;F16L41/03;H01J37/32;H01L21/00;H01L21/304 主分类号 F16K11/20
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