| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor tester device capable of readily preventing the warpage of a performance board. SOLUTION: This semiconductor tester device is equipped with the performance board, wherein a DUT socket on which an inspection object IC is mounted is fixed on one surface. The device is characterized, by being equipped with a pressure-receiving spacer whose one surface is in contact with the other surface of the performance board, provided oppositely to the DUT socket; and a pressure-receiving plate whose one surface is in contact with the other surface of the pressure-receiving spacer, provided detachably on the performance board. COPYRIGHT: (C)2007,JPO&INPIT
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