| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus capable of accurately measuring the amount of local lattice distortion and stress values of crystal materials and a stress value of a stress source, which applies stress to the crystal materials. SOLUTION: Convergent electron rays are made incident onto an evaluation region of a crystal material to acquire a HOLZ figure formed by convergent electron rays transmitted through the crystal material (step S11-S13). The splitting width of HOLZ lines is measured on the basis of the acquired HOLZ figure (step S14). On the basis of the splitting width of the HOLZ lines, stress of the evaluation region of the crystal region is evaluated (step S15). COPYRIGHT: (C)2007,JPO&INPIT
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