| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for operating a laser light source which monitors a damage of nonlinear crystal used for the laser light source with high accuracy to stably supply a laser beam. SOLUTION: The method for operating the laser light source having a wavelength converter which inputs the laser beams with two-wavelength in the nonlinear crystal to output wavelength of sum frequency is characterized by providing steps of: inputting only a laser beam of one wavelength in the nonlinear crystal; measuring intensity of scattered light of the laser beam with one wavelength by a light receiving sensor installed on an optical axis of output light with the wavelength of the sum frequency among the laser beams with two-wavelength to be input and judging a damage state of the nonlinear crystal based on a measurement value obtained by intensity measurement by the light receiving sensor. COPYRIGHT: (C)2007,JPO&INPIT |
