| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive alignment device and visual inspection equipment capable of computing the center position of a substrate at high speed. SOLUTION: Light projections 22a and 22b irradiate the periphery of a substrate. Light-receivers 23a and 23b detect the light irradiated from each of light projections 22a and 22b. A memory 42 memorizes correspondence information where the result of detection by the light-receivers 23a and 23b are associated with the position of the substrate. An alignment control unit 41 computes the center position of the substrate by using the above correspondence information. COPYRIGHT: (C)2007,JPO&INPIT |
