| 摘要 |
PROBLEM TO BE SOLVED: To facilitate work for aligning a probe point with an electrode of an inspection body after mounting on a prober. SOLUTION: Before a probe card is placed on the prober, probe information is determined regarding at least three reference probes P4, P5 and P6 among a plurality of probes 38. The method determines at least either point positions indicating coordinate positions of the points of the reference probes P4, P5 and P6 with the probe card placed on the prober, or electrode positions indicating coordinate positions of electrodes corresponding to the reference probes P4, P5 and P6 with the planar inspection body 12 having a plurality of electrodes corresponding to the probes 38. Based on the probe information and at least either the point positions or the electrode positions, the probe card and the inspection body 12 placed on the prober are relatively displaced to have the points of the reference probes P4, P5 and P6 aligned with the electrodes of the inspection body. COPYRIGHT: (C)2007,JPO&INPIT
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