| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor in which in-plane distortion induced from joining of a movable substrate and a fixed substrate is attempted to reduce. SOLUTION: The pressure sensor 1 has a movable substrate 10 and a fixed substrate 20, where each opposed surface 10a and 20a are joined tightly so as to be facing. A diaphragm 11 is formed on the movable substrate 10 as a first thin wall part while a conductive film 14a is formed on fringe of the diaphragm 11. On the fixed substrate 20 a buffer section 24 is formed as a second thin wall part, which is constructed at the base section of concave portions 25a and 25b formed on the both face while a joining section 35 is formed on its periphery. Joining between the movable substrate 10 and the fixed substrate 20 is an anode joining between the joining surface 35a of joining section 35 of the fixed substrate 20 and the conductive film 14a formed on the movable substrate 10. COPYRIGHT: (C)2007,JPO&INPIT
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