| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of producing on a massive scale, a high purity carbon fiber with uniform length having less damage. SOLUTION: The production method comprises: a first step of mounting a substrate 4 on a substrate cartridge 2; a second step of forming the film of a catalyst on the substrate 4; a third step of setting the substrate cartridge 2 in a thermal CVD device 6; a fourth step of forming the film of the carbon fiber 28 on the surface of the substrate by the thermal CVD device 6; a fifth step of taking out the substrate cartridge 2 from the device 6; and a sixth step of separating and collecting the carbon fiber 28 by using the pressure of a gas non-reactive to the catalyst. Since the same substrate 4 can repeatedly be used, the mass production of the carbon fiber 28 is made possible. COPYRIGHT: (C)2007,JPO&INPIT
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