| 摘要 |
<P>PROBLEM TO BE SOLVED: To eliminate the occurrence of particles and suppress the occurrence of defects at the processings a processed film. <P>SOLUTION: The invention comprises steps of forming a liquid film 204 on the principal surface of a substrate supplying application film, forming medicinal solution 206 containing solvent on the substrate, forming a processed film 207 by removing a part of the solvent contained in the liquid film 204, selectively irradiating processing light on the processing region of the processed film 207, selectively removing the processed film 207, and carrying out a heating process for almost completely removing the solvent contained in the processed film 207, after the irradiation of the processing light. <P>COPYRIGHT: (C)2007,JPO&INPIT |
