| 摘要 |
PROBLEM TO BE SOLVED: To provide a back pressure-regulating valve structured so that a valve element secured to a diaphragm is energized by a spring, capable of causing the valve element and the valve seat to abut to each other uniformly irrespective of the parallelism of the two end faces of the spring. SOLUTION: The back pressure-regulating valve is equipped with the valve body 5 having an influx passage 7 and an exhaust passage 8 and furnished with a recess 7c in communication with the influx passage 7, the diaphragm 10 mounted in the recess 7c, the valve element 11 fixed to the diaphragm 10, the valve seat 6 formed in the valve body 11, and an energizing member 35 to energize the valve element 11 toward the valve seat 6, in which the area between the influx passage 7 and the exhaust passage 8 is closed while the valve element 11 abuts to the valve seat 6, and is opened when the valve element 11 separates from the valve seat 6, wherein the valve element 11 is in point contact with a transmitting member 33 supporting the movable side end 35b of the energizing member 35 and transmitting the energizing force to the valve element 11. COPYRIGHT: (C)2007,JPO&INPIT
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