发明名称 Test pattern of CMOS image sensor and method of measuring process management using the same
摘要 The test pattern according to the present invention consists of an opaque metal film pattern formed on a semiconductor substrate, an insulating film formed on the semiconductor substrate and the metal film pattern, a red color filter formed on the insulating film, a planarization layer formed on the insulating film and the red color filter, and a number of micro-lenses formed on the planarization layer.
申请公布号 US2007080347(A1) 申请公布日期 2007.04.12
申请号 US20060545462 申请日期 2006.10.11
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 CHO EUN S.;KIM KEE H.
分类号 H01L23/58 主分类号 H01L23/58
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