发明名称 |
Heat treatment equipment and method of driving the same |
摘要 |
Heat treatment equipment and a method of driving the same are provided. The heat treatment equipment includes: a process tube having an aperture at one side thereof; a sealing unit for opening or closing the aperture; and a pressure sensor for measuring sealing pressure between the sealing unit and the one side of the process tube. In the heat treatment equipment, the aperture of the process tube can be sealed according to the sealing pressure of the sealing unit so that the process tube can be precisely sealed.
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申请公布号 |
US2007080156(A1) |
申请公布日期 |
2007.04.12 |
申请号 |
US20060528751 |
申请日期 |
2006.09.28 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SEO DAE-MAN;LEE JANG-HYEOK;KIM DAE-WOO |
分类号 |
H05B7/18 |
主分类号 |
H05B7/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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