| 摘要 |
<P>PROBLEM TO BE SOLVED: To attain extended lifetime of an excimer laser optical component or an excimer laser optics and to provide a method for producing the optical component or the optics. <P>SOLUTION: Optical lithography components or elements are hermetically sealed by a durable coating of a hermetically sealing material selected from a group consisting of oxide films and fluorinated oxide films. The durable coating of the hermetically sealing material is applied to one of more faces of the optical element, either directly to the face of the element or over a selected coating (for example, an anti-reflective coating) that has been applied to the element. <P>COPYRIGHT: (C)2007,JPO&INPIT |
