| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus and an inspection method of a flexure blank for an HDD suspension capable of automatically and surely discriminating the presence/absence of the defect of the flexure blank for the HDD suspension. SOLUTION: The inspection apparatus comprises: a camera 3 for imaging the flexure blank 30 for the HDD suspension; a lighting device 4 for radiating light for imaging; a filter 11 for limiting the wavelength of the light to be made incident on the camera 3 such that reflected light from the insulating layer of the flexure blank 30 for the HDD suspension becomes much more than reflected light from the other parts; and an image processing means for detecting the presence/absence of the defect of the flexure blank for the HDD suspension on the basis of imaging signals from the camera 3. COPYRIGHT: (C)2007,JPO&INPIT
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