| 摘要 |
PROBLEM TO BE SOLVED: To provide a wheel for mirror finishing, restraining erosion of an abrasive grain layer in performing mirror-finished grinding not to cause scratch in a wafer. SOLUTION: The surface of the abrasive grain layer outside of both the working surface used for grinding the abrasive grain layer and a fixing surface fixed to a bed 3, is coated with material having the substantially same quality as a binder material, or lower material strength than the binder material. The thickness of a coating 2 coating the abrasive grain layer ranges from 0.005 to 0.5 mm. As the material quality of the coating, resin not affecting the grinding capability is suitable. When the binder material is a vitrified bond, glaze may be used. As the kind of resin, polyimide resin hardly influenced by heat in the process of machining is most favorable. COPYRIGHT: (C)2007,JPO&INPIT
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