发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which improves the driving capacity of a PMOSFET in a CMOSFET using a gate insulating film having a high dielectric constant, and also to provide a manufacturing method for the semiconductor device. SOLUTION: First gate-electrode side-wall insulating films 150A and 150B are formed on the side faces of first insulating films 100A and 100B, while second gate-electrode side-wall insulating films 160A and 160B are formed on the side faces of a second gate electrode 80 and the second gate insulating film 60. Consequently, a step forming an interface insulating film 170 is formed on an interface between the second gate electrode 80 and the second gate insulating film 60. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007095887(A) 申请公布日期 2007.04.12
申请号 JP20050281537 申请日期 2005.09.28
申请人 TOSHIBA CORP 发明人 SATO MOTOYUKI;WATANABE TAKESHI
分类号 H01L21/8238;H01L27/092 主分类号 H01L21/8238
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