Fluid injection devices and analyzing and maintenance methods thereof

摘要

Fluid injection devices with surface acoustic wave (SAW) devices and methods of analyzing and cleaning the same. The fluid injection device comprises a fluid injection element and a surface acoustic wave device with slanted fingers inter-digital transducers on the fluid injection element. The fluid injection element comprises a fluid chamber in a substrate with a structural layer thereon. At least one fluid actuator is disposed on the structural layer opposing the fluid chamber. A nozzle adjacent to the at least one fluid actuator passes through the structural layer and connects the fluid chamber.