LASER DIRECT DRAWING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a laser direct drawing apparatus in which the trajectory of a laser beam in a main scanning direction is substantially linearized and excellent drawing accuracy is obtained.

SOLUTION: An optical axis deflecting means 20 which deflects the laser beam 5 which is made incident to a polygon mirror 6 is provided on the optical axis O of the laser beam 5, the optical axis deflecting means 20 is operated when drawing, the characteristics of the optical system which makes the laser beam 5 deflected with the polygon mirror 6 incident to an object 10 to be drawn are canceled out, thus the trajectory of the laser beam 5 is substantially linearized on the object 10 to be drawn.

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