| 摘要 |
<P>PROBLEM TO BE SOLVED: To automatically set inspection conditions for each inspection object, and to easily and surely inspect each inspection object. <P>SOLUTION: This inspection system which conducts a predetermined inspection for each inspection object, such as a specimen or a sample comprises an RFID tag 101, which is placed on a preparation 100 holding the inspection object and stores information correlated with the inspection object, an RFID processing part 7 which reads the information from the RFID tag 101 via an electric wave transmitted/received between an antenna 8 and the RFID tag 101, and a control part 6, which sets up the a microscopic condition for the inspection object, based on the information read by the RFID processing part 7. <P>COPYRIGHT: (C)2007,JPO&INPIT |
