发明名称 METHOD OF MANUFACTURING CRYSTAL SUBSTRATE
摘要 <p><P>PROBLEM TO BE SOLVED: To obtain a means of uniformly beveling an AT cut crystal substrate which is a rectangular flat plate by solving the problem that the crystal substrate is not processed to a uniform bevel width when the crystal substrate is put in a cylindrical container together with an abrasive material to bevel the crystal substrate and the container is rotated at a specified rotating speed for a specified time for beveling. <P>SOLUTION: The crystal substrate is obtained by: previously cutting four corners of an AT cut crystal substrate in a rectangular flat plate shape; putting the substrate in the cylindrical container together with the abrasive material; and rotating the cylindrical container at the specified rotating speed to bevel peripheral edge parts of the crystal substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2007096701(A) 申请公布日期 2007.04.12
申请号 JP20050282826 申请日期 2005.09.28
申请人 EPSON TOYOCOM CORP 发明人 SATO KENJI
分类号 H03H9/19;H01L41/18;H01L41/337;H01L41/39 主分类号 H03H9/19
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