摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a means of uniformly beveling an AT cut crystal substrate which is a rectangular flat plate by solving the problem that the crystal substrate is not processed to a uniform bevel width when the crystal substrate is put in a cylindrical container together with an abrasive material to bevel the crystal substrate and the container is rotated at a specified rotating speed for a specified time for beveling. <P>SOLUTION: The crystal substrate is obtained by: previously cutting four corners of an AT cut crystal substrate in a rectangular flat plate shape; putting the substrate in the cylindrical container together with the abrasive material; and rotating the cylindrical container at the specified rotating speed to bevel peripheral edge parts of the crystal substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |