| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type acceleration sensor capable of detecting vertical acceleration and horizontal acceleration together, and capable of detecting the vertical acceleration with sufficient sensitivity. SOLUTION: An oscillating member 16a oscillates with acceleration to be measured, in a cavity 17 constituted of a first and a second glass substrate 11, 18, and a silicon substrate 16. Since the oscillating member 16a is a conductor, the capacitance between a first and a second fixed electrode 14, 19 changes by oscillation of the oscillating member 16a. The acceleration can be measured by detecting this change. Vertical and horizontal acceleration can be obtained being separated from each other, respectively, since a first and a second capacitance between the oscillating member 16a and the first and second electrodes 14, 19, and a third capacitance between the first and second electrodes 14, 19 are detected. COPYRIGHT: (C)2007,JPO&INPIT
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