| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure capable of positively removing air bubbles in supply fluid and preventing supply fluid from remaining in a flow passage. SOLUTION: A compound fluid control unit 10 having a valve 20 for supply, a valve 30 for discharge, a valve 40 for washing, and a valve 50 for purging is constituted. In this case, this compound fluid control unit 10 has a flow passage block 11 forming a valve seat of each valve, an output port 15 and an air exhaust port 16 are provided at a lower end and an upper end of the flow passage block 11, respectively, a first flow passage 12 provided in the flow passage block 11 passes through a valve chamber 24 of the valve 20 for supply, the valve 30 for discharge is provided in the front of the valve 20 for supply, a second flow passage 13 communicates the valve chamber 24 of the valve for supply with a valve chamber 34 of the valve for discharge, the valve 50 for purging is provided in the front of the valve 40 for washing, and a third flow passage 14 for communicating a valve chamber 44 of the valve for washing with a valve chamber 54 of the valve for purging is provided by crossing the first flow passage 12. COPYRIGHT: (C)2007,JPO&INPIT
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