ELECTRICALLY RESPONSIVE DEVICE

摘要

Electrically responsive devices and methods for fabricating electrically- responsive devices involves applying an electrically responsive material (e.g. piezoelectric material) (132) over at least a portion of a surface of a substrate material (104) and applying an electrode material (140) over at least a portion of a surface of the electrically responsive material. At least one region of the electrode material (140) is selectively removed exposing the electrically responsive material (244) . At least some of the electrically responsive material is selectively removed in a region corresponding to the at least one region of the electrode material.