| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce trace data and acquire suitable exposure point data in a method for acquiring the exposure point data, which is used for exposing an exposure pattern on a substrate by an exposing head, whereby the exposure point data are acquired by reading one of a plurality of trace data preliminarily stored corresponding to deformation etc. of the substrate. <P>SOLUTION: The trace data corresponding to a plurality of virtual exposure point data loci are acquired and preliminarily stored, and at the same time, information of an exposure point data locus corresponding to an exposure locus on the substrate on exposing is acquired. An exposure image data is sampled based on the information of the exposure point data locus. A difference data between the sampled data and a trace data corresponding to information of a virtual exposure point data locus simulating the information of the exposure point data locus is acquired. The difference data is encoded and the difference encoded data is acquired, and subsequently the exposure point data is acquired based on the difference encoded data and the trace data. <P>COPYRIGHT: (C)2007,JPO&INPIT |
